Then shall thy light
'owr  (ore)
illumination or (concrete) luminary (in every sense, including lightning, happiness, etc.) -- bright, clear, + day, light (-ning), morning, sun.
break forth
baqa`  (baw-kah')
to cleave; generally, to rend, break, rip or open
as the morning
shachar  (shakh'-ar)
dawn (literal, figurative or adverbial) -- day(-spring), early, light, morning, whence riseth.
and thine health
'aruwkah  (ar-oo-kaw')
wholeness -- health, made up, perfected.
shall spring forth
tsamach  (tsaw-makh')
to sprout (transitive or intransitive, literal or figurative) -- bear, bring forth, (cause to, make to) bud (forth), (cause to, make to) grow (again, up), (cause to) spring (forth, up).
mherah  (meh-hay-raw')
a hurry; hence (adverbially) promptly -- hastily, quickly, shortly, soon, make (with) speed(-ily), swiftly.
and thy righteousness
tsedeq  (tseh'-dek)
the right (natural, moral or legal); also (abstractly) equity or (figuratively) prosperity -- even, (that which is altogether) just(-ice), (un-)right(-eous) (cause, -ly, -ness).
shall go
halak  (haw-lak')
to walk (in a great variety of applications, literally and figuratively)
paniym  (paw-neem')
the face (as the part that turns); used in a great variety of applications (literally and figuratively); also (with prepositional prefix) as a preposition (before, etc.)
thee the glory
kabowd  (kaw-bode')
weight, but only figuratively in a good sense, splendor or copiousness -- glorious(-ly), glory, honour(-able).
of the LORD
Yhovah  (yeh-ho-vaw')
(the) self-Existent or Eternal; Jehovah, Jewish national name of God -- Jehovah, the Lord.
shall be thy rereward
'acaph  (aw-saf')
to gather for any purpose; hence, to receive, take away, i.e. remove